MEMS micromirrors are a key technology enabling self-driving cars, automotive head-up displays, and augmented reality headsets like Microsoft Hololens and MEMS confocal microscopes. However, the design and fabrication of practical MEMS micromirrors remains challenging because it requires in the integration of electric engineering, mechanical engineering, optical engineering and MEMS technologies. Laser beam scanning (LBS) systems typically consist of a 2-axis MEMS micromirror, solid-state lasers, photodetectors, optics, and a micromirror control module. For high-resolution imaging, closed-loop feedback control is essential to correlate each pixel with the rotating micromirror's position.

This project aims to design a MEMS mirror with integrated actuators and sensors for real-time synchronous projection. It will also focus on the mechanical packaging using a commercial semiconductor foundry process to achieve excellent performance. The goals are to: