build a desk-top photo-lithography stepper
Project Description
Photo-lithography machine is a crucial tool to modern microelectronics industry, which projects micro-patterns from photo-masks onto silicon substrates. In this project, we will:
(1) Build a photo-litho stepper with UV light source
(2) Develop graphical user interface for the machine
(3) Perform photolithography process with the machine, including spin coating photo-resist, developing resist and metal-film deposition.
(1) Build a photo-litho stepper with UV light source
(2) Develop graphical user interface for the machine
(3) Perform photolithography process with the machine, including spin coating photo-resist, developing resist and metal-film deposition.
Supervisor
KANG, Kaifei
Quota
1
Course type
UROP1100
UROP2100
Applicant's Roles
Assembling the photo-litho machine
Programming the user interface for the machine
Programming the user interface for the machine
Applicant's Learning Objectives
The applicant will learn
1. basic principles for photolithography
2. basic programming knowledge about equipment control and user interface
3. basic knowledge about photolithography process
1. basic principles for photolithography
2. basic programming knowledge about equipment control and user interface
3. basic knowledge about photolithography process
Complexity of the project
Challenging