DIY A Compact Desktop Maskless Photolithography System for Rapid Micro- and Nano-Fabrication
Project Description
This project aims to develop a compact, desktop-scale maskless photolithography system for rapid microfabrication without the need for physical photomasks. By combining programmable optical pattern generation with precision projection optics and software-controlled exposure, the system will enable direct writing of user-defined micro-scale patterns onto standard photoresists. Compared to conventional mask-based lithography, the proposed platform will significantly reduce cost and turnaround time, allowing fast design iteration and flexible device prototyping. The system is designed to achieve micron-level resolution while remaining compatible with common substrates and photoresists, making it an enabling tool for research in microelectronics, photonics, and quantum materials, as well as for training and exploratory fabrication in laboratories with limited cleanroom access.
Supervisor
KANG, Kaifei
Quota
2
Course type
UROP1100
UROP2100
UROP3100
UROP4100
Applicant's Roles
The student applicant will be responsible for the design, construction, and characterization of the desktop maskless photolithography system. This includes optical layout design and alignment, integration of the programmable pattern generator and illumination source, development of basic control software, and calibration of exposure parameters using standard photoresists. The student will also perform performance evaluation of the system, including resolution, uniformity, and reproducibility, and demonstrate its application through fabrication of representative micro-scale test structures. Through this project, the student will gain hands-on training in optics, precision instrumentation, and microfabrication while contributing directly to the development of an enabling research tool.
Applicant's Learning Objectives
1. Understand the fundamental principles of photolithography, including resolution limits, exposure dose, and photoresist behavior

2. Gain hands-on experience in optical system design, alignment, and characterization for projection-based imaging

3. Learn to integrate opto-mechanical components, including illumination sources, spatial light modulators, and precision stages

4. Develop basic software skills for instrument control, pattern generation, and exposure automation

5. Acquire practical microfabrication skills, including photoresist processing and evaluation of patterned structures

6. Strengthen experimental problem-solving and iterative design skills
Complexity of the project
Moderate