Piezoelectric micromachined ultrasonic transducers for sensing and imaging
Project Description
Piezoelectric micromachined ultrasonic transducers (PMUTs) are microsystems using piezoelectric materials for an acoustic mapping of the environment. Compared to bulk ultrasonic devices, PMUTs are better for miniaturization and integration. PMUTs have been widely used in our daily life, including the range finding in autonomous driving, medical ultrasound imaging, fingerprint sensing, and so on. This project, from 1000-level to 4000-level, will cover the fundamental understanding of PMUT, device modeling, and the related microfabrication technologies.
Supervisor
YANG, Yansong
Quota
4
Course type
UROP1000
UROP1100
UROP2100
UROP3100
UROP3200
UROP4100
Applicant's Roles
At different levels, students need to learn the fundamental knowledge of PMUT and receive training in Nanosystem Fabrication Facility (NFF) to learn how to use the equipment for nano/microfabrication. They also need to participate in meetings and discussions with the supervisor.
Applicant's Learning Objectives
At different levels, students need to learn how to design and simulate PMUT devices. In the higher levels, students will receive laboratory training in the cleanroom for microfabrication techniques: material depositions, oxidation, wafer bonding, optical lithography, wet and dry etching, lift-off, and structure release. After learning how to use the corresponding machines, they will learn how to plan a microfabrication process to fabricate their own designs.
Complexity of the project
Moderate